Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatment

Release time:2023-08-24 Hits:

Impact Factor6.7

DOI number:10.1016/j.apsusc.2021.149121

Affiliation of Author(s):西北大学；荷语布鲁塞尔自由大学（VUB）；欧洲微电子中心（IMEC）

Journal:Applied Surface Science

Place of Publication:荷兰

Key Words:SiCN film；Annealing；Microstructure；Photoluminescence；Sputtering；Optoelectronics

Note:第一作者，SCI检索，中科院一区，TOP期刊。

Indexed by:Journal paper

Document Code:10.1016/j.apsusc.2021.149121

Discipline:Engineering

First-Level Discipline:Electronic Science and Techonology

Document Type:J

Volume:546

Page Number:149121-149126

Number of Words:6666

Translation or Not:no

Date of Publication:2021-04-30

Included Journals:SCI

Links to published journals:https://doi.org/10.1016/j.apsusc.2021.149121

First Author:Qiang Li

First Author:Cheng Chen

Correspondence Author:Wu Zhao

All the Authors:Manzhang Xu

All the Authors:Yingnan Wang

All the Authors:Xuewen Wang

All the Authors:Zhiyong Zhang

All the Authors:Johan Stiens