Impact Factor6.7
DOI number:10.1016/j.apsusc.2021.149121
Affiliation of Author(s):西北大学；荷语布鲁塞尔自由大学（VUB）；欧洲微电子中心（IMEC）
Journal:Applied Surface Science
Place of Publication:荷兰
Key Words:SiCN film；Annealing；Microstructure；Photoluminescence；Sputtering；Optoelectronics
Note:第一作者，SCI检索，中科院一区，TOP期刊。
Indexed by:Journal paper
Document Code:10.1016/j.apsusc.2021.149121
Discipline:Engineering
First-Level Discipline:Electronic Science and Techonology
Document Type:J
Volume:546
Page Number:149121-149126
Number of Words:6666
Translation or Not:no
Date of Publication:2021-04-30
Included Journals:SCI
Links to published journals:https://doi.org/10.1016/j.apsusc.2021.149121
First Author:Qiang Li
First Author:Cheng Chen
Correspondence Author:Wu Zhao
All the Authors:Manzhang Xu
All the Authors:Yingnan Wang
All the Authors:Xuewen Wang
All the Authors:Zhiyong Zhang
All the Authors:Johan Stiens
Associate professor
Supervisor of Master's Candidates
Name (English):Cheng Chen
Name (Pinyin):chen cheng
Date of Birth:1990-03-19
E-Mail:
Date of Employment:2021-05-17
School/Department:Northwest University-China (NWU)
Administrative Position:Head of the department
Education Level:With Certificate of Graduation for Doctorate Study
Business Address:Room 205, Informatics Building, Chang'an Campus, Northwest University-China
Gender:Male
Contact Information:QQ: 512569826 Email: Cheng.Chen@vub.be; cchen@nwu.edu.cn
Degree:Double Degree
Status:Employed
Academic Titles:Faculty of the Electronics Science and Technology
Other Post:Guest Post-doc Researcher in VUB
Alma Mater:Vrije Universiteit Brussel (VUB); NWU
Discipline:Electrical Circuit and System
Microelectronics and Solid-state Electronics
PostalAddress :
Telephone :
Email :
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