Direct atomic fabrication and dopant positioning in Si using electron beams with active real time image-based feedback
Release time:2021-07-21
Hits:
Impact Factor0.0
DOI number:10.1088/1361-6528/aabb79
Journal:Nanotechnology
Indexed by:Journal paper
Document Type:J
Volume:29
Issue:25
Page Number:255303
Translation or Not:no
Date of Publication:2018-06-22
Included Journals:SCI
First Author:Stephen Jesse
All the Authors:Bethany M Hudak
All the Authors:Eva Zarkadoula
All the Authors:Jiaming Song
All the Authors:Artem Maksov
All the Authors:Miguel Fuentes-Cabrera
All the Authors:Panchapakesan Ganesh
All the Authors:Ivan Kravchenko
All the Authors:Paul C Snijders
All the Authors:Andrew R Lupini
All the Authors:Albina Y Borisevich
All the Authors:Sergei V Kalinin